- SERVICE &
REPAIRS of High Vacuum Pumps ,Turbo pumps and controllers (frequency converters),High Vacuum Pumps:
ion,turbo,diffusion,cryo,mechanical,dry,scroll,rotary
vane,mechanical boosters & Leak Detectors.
- Supplier
of RECONDITIONED (Rebuilt, Refurbished) High vacuum
pumps: wet, dry, scroll, rotary, diffusion, mechanical
booster, turbo molecular, ion, cryo.
- We Buy vacuum pumps,turbo
pumps, ion pumps, cryo pumps,
diffusion pumps, vane pumps, oil free pumps, dry pumps, mechanical
vacuum pumps and Leak Detectors.
- We
Sell rebuilt (refurbished) Vacuum
Pumps and Leak Detectors.
We Sell
Vacuum Pumps and offer Vacuum Pump Service!
High
Vacuum Pumps for Sale!
SEIKO SEIKI TURBOMOLECULAR PUMPS
SEIKO SEIKI TURBOMOLECULAR PUMPS PRICE,SALES AND SERVICE.
Edwards STP magnetically levitated turbomolecular pumps
- Designed by continuous improvement on existing proven reliable technology
- Advanced materials and designs provide:
- Class leading performance
- The broad product range covers all potential turbo pump applications.
- ualified by all major semiconductor OEM?s
- Used in all major semiconductor fabrication plants
- Installed base of over 80000 units, 85% in the semiconductor industry
Edwards STP magnetically levitated turbomolecular pumps - Key features
- Multi-axis magnetic bearing system
- High Throughput versions for high flow processes
- Low vibration characteristics
- Advanced controller technology
- Full interfacing capability
Edwards STP magnetically levitated turbomolecular pumps - Features & benefits
- Improved pumping performance
- Optimized for semiconductor process pressures
- Maximized gas throughput for each flange size
- Applications specific models
- New generation universal controllers
- Compact (1/2 rack) controller
- Auto tune enabling "mix and match" pumps
- High power d.c. motor drive
Edwards
is a leader in clean and dry vacuum technology. The first STP pumps
were sold in 1983 and there are now over 80000 installations worldwide.
85% are operating on semiconductor process tools where they demonstrate
exceptional levels of reliability. STP pumps are the first choice for
applications demanding high up-time, hydrocarbon-free pumping, minimal
maintenance and low vibration.
- Proven reliability.
- Clean oil-free high vacuum.
- Complete range from 300 to 4500 l s-1.
- Application specific models.
- Very low noise and vibration.
- Low cost of ownership.
- Virtually maintenance free.
- Installation in any orientation.
- Full remote control interface.
- Supported globally by Edwards
Proven magnetic bearing technologyThe
rotor is entirely suspended by magnetic bearings so all contact between
the rotor and the remainder of the pump is eliminated. As well as
giving very low vibration, the elimination of contact means no bearing
wear and no requirement for consequent pump maintenance.
Edwards STP range
Edwards UHV series The
Ultra High Vacuum series of magnetically levitated turbo molecular
pumps are the products of choice for the semiconductor, surface science
or high energy physics industries. They offer unrivalled reliability,
performance, cleanliness and class leading low vibration levels. The
pumps are all d.c. powered, eliminating the need for batteries, they
use a half rack controller which features auto-tuning and advanced
diagnostic features. The range contains pumps with speeds from 300 l
s-1 to 1000 l s-1 all of which are available in ISO or CF flange
variants.
Edwards High throughput series The
high throughput series of magnetically levitated turbo pumps generate
the high gas flows required by the current generation of semiconductor
etch, ion implant and LCD systems. All the pumps feature a five active
axis magnetic bearing system and a d.c. drive for increased robustness
and stability. They use a Holweck stage to provide advanced throughput
performance. They operate via a half rack controller with auto-tuning,
advanced diagnostics and an integrated temperature management system
The range operates with throughput speeds from 300 l s-1 to 1300 l s-1.
Edwards Advantage series The
new Advantage series of magnetically levitated turbo pumps have been
designed to provide the highest levels of throughput required by the
next generation of semiconductor etch and CVD processes. They have been
developed, using continuous improvement techniques, from the ultra
reliable, high performance H series of products. Their advanced rotor
design combined with selection of the best materials has allowed the
creation of the next generation of high throughput turbo pump inside
the same footprint as many of the existing models. The range contains
pumps with throughput speeds from 800 l s-1 to 4500 l s-1.
Edwards STP features
Edwards Oil freeAll
STP turbomolecular pumps are oil free. The use of magnetic bearings
eliminates all hydrocarbon lubricants ensuring no contamination of the
vacuum process from the turbomolecular pump. This feature is vital in
the semiconductor industry (where device densities are constantly
increasing) and in surface science or high energy physics applications
(where even minute degrees of contamination disrupt measurements).
Maintenance free Unlike
conventional mechanical bearings, magnetic levitation means there is no
frictional contact, eliminating sources of wear and vibration. This
feature enables STP turbomolecular pumps to run for years with
virtually no maintenance, reducing annual operating costs to a minimum
and ensuring maximum up-time is achieved. This maintenance free feature
can be particularly beneficial on processes producing chemical or
radioactive contamination.
Vibration free Magnetic
levitation of the rotor results in an extremely low level of noise and
vibration. Peak-to-peak vibration level is less than 0.02 ?m. This
amplitude remains constant throughout the life of the pump and is free
from troublesome sub-harmonics.
Vibration analysis STP300 displacement/frequencyAutomatic balancing system (ABS) ABS is a unique patenteddevelopment
of 5-axis technology. If any rotor imbalance is introduced (by
deposition of process by-products, for example), sensors in the pump
detect changes in the rotor motion and compensate the magnetic bearing
fields to allow the rotor to spin on its natural inertial axis. This
minimizes the vibration transmitted to the inlet flange. ABS works at
all pump rotational speeds.
Safety backup bearingsSTP
pumps have dry lubricated axial and radial mechanical bearings as
safety backup bearings. These support the rotor and protect the pump in
the event of a total disruption of magnetic suspension or a massive air
inrush which overcomes the magnetic bearing stiffness. These high
precision ball bearings are dry lubricated and are not in contact with
the rotor during normal operation.
Optimized rotors The
multistage pure bladed rotors in the UHV pumps provide the high vacuums
required for clear beamlines on CD SEM machines, mass spectrometers and
ion implanters. They provide optimum pumping performance with excellent
light gas compression ratios.
Compound rotors The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure.
Advanced series compound rotors The advanced series
pumps
have a redesigned compound rotor, the materials of manufacture have
been improved to reduce the clearances within the pump, the rotors have
an advanced 3D design and the Holweck stage has been redesigned to
increase the throughput.
Corrosion resistant To
ensure a high level of resistance to corrosion, the corrosion resistant
(C) and high throughput (H-C) pumps have nickel coated rotors/stators
and pump internals suitable for ion implantation and plasma etching.
Further enhanced levels of protection are available on request.
Nitrogen purging The
corrosion resistant (C) pumps and the high throughput (H-C) pumps have
a nitrogen purge facility, a constant flow of nitrogen through the pump
dilutes corrosive gases minimizing their damage to the pumps motor and
sensor coils.
TMS system The
Edwards Temperature Management System is available on a wide range of
turbo pumps. It is designed to optimize the temperature within the
pump, dramatically reducing the particle condensation within. This will
not only considerably enhance the performance of the pump under harsh
process conditions, but also increase its operational life.
Edwards STP magnetically levitated turbomolecular pumps - Applications
Semiconductor fabrication STP
turbomolecular pumps are the number one choice for the world?s leading
semiconductor etch and implant manufacturers. The pumps are installed
on the harshest applications (for example, metal etch) and demonstrate
exceptional levels of reliability.
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
Scientific applications STP
pumps are used extensively in the world?s foremost research and
development institutes. The pumps satisfy stringent performance
criteria and reliability expectations. They are also used in the
following applications:
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
Data summary - Edwards STP magnetically levitated turbomolecular pumps
Edwards STP-XA4503C turbomolecular pump
STP-XA4503C turbomolecular pump
Pumping speed l s-1:
N2: 3800/4000/4300
H2: 2500
Inlet flange: VG300/ISO320F/VG350
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 24,000
Control unit:
Edwards STP-iX455 turbomolecular pump
Pumping speed l s-1:
N2: 300/450
H2: 300/460
Inlet flange: ISO100K/DN100CF/ISO160K/DN1600CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO:10-8 DN Flange
CF (not C version):10-6 ISO Flange
CF (C version only):
Rated speed:Control unit:
Edwards STP301 - STP301C turbomolecular pump
Pumping speed l s-1:
N2: 300
H2:300
Inlet flange: ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 6.5 x 10-6 (5 x 10-8)
CF (not C version):10-8 (10-10) order
CF (C version only): 10-7 (10-9) order
Rated speed: 48,000Control unit: SCU-301/451
Edwards STP-L301 - STP-L301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
Pumping speed l s-1:
N2: 260
H2: 290
Inlet flange: ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-6 (108) order
CF (not C version):
CF (C version only):
Rated speed: 48,000Control unit: SCU-301/451
Edwards STP603 - STP603C turbomolecular pumpPumping speed l s-1:
STP603/STP603C turbomolecular pump
Pumping speed l s-1:
N2: 650
H2: 550
Inlet flange: ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version): 10-8 (10-10) order
CF (C version only): 6.5 x 10-6 (5 x 10-8)
Rated speed: 35,000Control unit: SCU-750
Edwards STP1003 - STP1003C turbomolecular pump
STP1003/STP1003C turbomolecular pump
Pumping speed l s-1:
N2: 1000
H2: 800
Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version): 10-8 (10-10) order
CF (C version only): 6.5 x 10-6 (5 x 10-8)
Rated speed: 35,000
Control unit:SCU-750
Edwards STPH301C turbomolecular pump
STPH301C high performance turbo pump
Pumping speed l s-1:
N2: 300
H2: 200
Inlet flange: ISO100K/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 48,000Control unit: SCU-750
Edwards STPH451C turbomolecular pump
STPH451C high performance turbo pump
Pumping speed l s-1:
N2: 450
H2: 300
Inlet flange: ISO160K/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9)order
CF (not C version):
CF (C version only):
Rated speed: 48,000Control unit:SCU-750
Edwards STPA803C turbomolecular pump
STPA803C "advantage" turbo pump
Pumping speed l s-1:
N2: 800
H2: 520
Inlet flange: ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 32,500Control unit: SCU-750
Edwards STPA1303C turbomolecular pump
STPA1303C "advantage" turbo pump
Pumping speed l s-1:
N2: 1300
H2: 800
Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 32,500Control unit:SCU-750
Edwards STPA1603C turbomolecular pump
STPA1603C turbomolecular pump
Pumping speed l s-1:
N2: 1600
H2: 1200
Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7
CF (not C version):
CF (C version only):
Rated speed: 36,500Control unit: SCU-750
Edwards STPA2203C turbomolecular pump
STPA2203C "advantage" turbo pump
Pumping speed l s-1:
N2: 2200
H2: 1700
Inlet flange: ISO250F/ICF305
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-6 (10-8)order
CF (not C version):
CF (C version only):
Rated speed: 27,000Control unit: SCU-1500
Edwards STP-XA2703C turbomolecular pump
STP-XA2703C turbo pump
Pumping speed l s-1:
N2: 2650
H2: 2050
Inlet flange: ISO250F/VG250
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 order
CF (not C version):
CF (C version only):
Rated speed: 27,500Control unit: SCU-1500
Edwards STP-XA3203C turbomolecular pump
STP-XA3203C turbo pumpPumping speed l s-1:
N2: 3200
H2: 2300
Inlet flange: ISO320F/VG300
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 order
CF (not C version):
CF (C version only):
Rated speed: 27,500
Control unit: SCU-1500
Edwards SCU750 control unit turbomolecular pump Control unit
Magnetic bearing control system: Digital control
Input voltage:
AC100 . 100-120
? 10% V a.c./AC200
200-240 ? 10% V a.c.
Power consumption VA
Without TMS: Max 850
With TMS: Max 1200
Input frequency Hz: 50/60 ? 2
Leak current mA: Max 3.5
Input phase: Main breaker rated current A: 10
Motor driving system: Three phase DC brush less motor driver
Allowable ambient temperature ?C: 0 . 40
Storage temperature ?C: -25 . 55
Mass kg: 8.5 TMS control unit: Built in Serial communication function: -
RS232: Standard
RS485: Standard
Panel display: LCD (20 characters, 2 lines)
Edwards SCU-1500 control unit turbomolecular pump Control unit
Magnetic bearing control system: Digital control
Input Voltage: 200 to 240 ? 10% V a.c.
Power consumption VA
Without TMS: 1500
With TMS: 2100
Input frequency Hz: 50/60 ? 2
Leak current mA: Max 3.5
Input phase: Single Phase
Main breaker rated current A: 15
Motor driving system: Three phase DC brush less motor driver
Allowable ambient temperature ?C: 0 to 40
Storage temperature ?C: -25 to 55
Mass kg: 12
TMS control unit: Built in
Serial communication function:
RS232: Standard
RS485: Standard
